Computational modeling in semiconductor processing

Detalles Bibliográficos
Autor Principal:	Meyyappan, M. (ed.)
Formato:	Libro
Lengua:	inglés
Datos de publicación:	Boston : Artech House, 1995.
Series:	Arte
Temas:	FABRICACION DE SEMICONDUCTORES MODELO COMPUTACIONAL
Descripción Física:	363 p.
ISBN:	0890067074

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Computational modeling in semiconductor processing

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